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Title: An investigation into the thin film deposition of binary oxide, ternary oxide and binary sulphide materials
Author: Thongchai, Prem
ISNI:       0000 0004 7660 2411
Awarding Body: University of Bath
Current Institution: University of Bath
Date of Award: 2019
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Metal oxide and metal sulphide materials dominate a wide range of attractive properties and also to provide potential performances to various applications. There is a challenge to prepare these materials as a thin film with great quality and properties. Aerosol-assisted chemical vapour deposition (AACVD) is a promising technique to offer a desired thin film. The objective of this work is the preparation of the metal oxide and metal sulphide thin films via AACVD technique with single source precursor. The properties of deposited films were characterised.
Supervisor: Johnson, Andrew ; Hill, Michael Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID:  DOI: Not available