Use this URL to cite or link to this record in EThOS: https://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.747838
Title: The development of surface morphology during ion etching
Author: Makh, Surinder S.
Awarding Body: Loughborough University of Technology
Current Institution: Loughborough University
Date of Award: 1981
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Abstract:
This thesis investigates the changes in surface shape which Occur when solid surfaces are subjected to bombardment and erosion by Energetic ion beams. The aspects which are studied lay particular emphasis on the type of problems encountered in the electronics industry where ion etching is used for the production of micro-relief on many commercial devices. Ion etching is also used extensively in surface analysis using techniques such as Auger Electron Spectroscopy, X-ray Photoelectron Spectroscopy and Secondary Ion Mass Spectroscopy both for surface cleaning and composition-depth profiling.
Supervisor: Not available Sponsor: Science Research Council ; Plessey Company Ltd
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID: uk.bl.ethos.747838  DOI: Not available
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