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Title: Monolithically integrated silicon carbide sensor arrays for extreme environments
Author: Roy, Sandip Kumar
Awarding Body: University of Newcastle upon Tyne
Current Institution: University of Newcastle upon Tyne
Date of Award: 2017
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Gas sensitive metal oxide semiconductor capacitors, utilising silicon carbide have been demonstrated for a range of applications, particularly in exhaust and combustion monitoring. As part of the control system, sensors play a pivotal role in the closed loop control of flue gas cleaning processes in power plants. Silicon Carbide Metal Oxide Semiconductor (SiC-MOS) gas sensors have previously demonstrated a response to a range of gas species including; H:, O2 and H2S. Because of the sensing mechanism responsible for the response of these sensors, these structures often limited to applications of sensing in a single gas ambient. For multiple gas species present in a mixture, it is not possible to uniquely identify the contribution from each individual gas species and so an array of sensors is required. This thesis concerns the fabrication of monolithic gas sensors and characterisation at harsh environments.
Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID:  DOI: Not available