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Title: The numerical modelling of focussed ion beam systems
Author: Amos, Robert J.
Awarding Body: Loughborough University of Technology
Current Institution: Loughborough University
Date of Award: 1987
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The work in this thesis examines the numerical modelling of focussed ion beam systems, with applications ranging from the surface analysis of materials by SIMS to microfabrication by ion beam lithography. An efficient and accurate computer programme has been developed and tested on medium sized machines in order to model the behaviour of beams of charged particles through electrostatic systems.
Supervisor: Not available Sponsor: Science and Engineering Research Council ; VG Ionex Ltd
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID:  DOI: Not available