Use this URL to cite or link to this record in EThOS: https://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.734103
Title: Ion erosion in surface analysis
Author: Duncan, S.
Awarding Body: Loughborough University of Technology
Current Institution: Loughborough University
Date of Award: 1985
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Abstract:
Low energy ion bombardment is a process used in surface analysis and in the electronics and telecommunications industries. Techniques such as Auger Electron Spectroscopy (AES), X-ray Photoelectron Spectroscopy (XPS) and Secondary Ion Mass Spectroscopy (SIMS) employ ion bombardment for surface cleaning and for the provision of composition-depth profiles.
Supervisor: Not available Sponsor: AERE Harwell ; SERC
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID: uk.bl.ethos.734103  DOI: Not available
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