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Title: Ion erosion in surface analysis
Author: Duncan, S.
Awarding Body: Loughborough University of Technology
Current Institution: Loughborough University
Date of Award: 1985
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Low energy ion bombardment is a process used in surface analysis and in the electronics and telecommunications industries. Techniques such as Auger Electron Spectroscopy (AES), X-ray Photoelectron Spectroscopy (XPS) and Secondary Ion Mass Spectroscopy (SIMS) employ ion bombardment for surface cleaning and for the provision of composition-depth profiles.
Supervisor: Not available Sponsor: AERE Harwell ; SERC
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID:  DOI: Not available