Use this URL to cite or link to this record in EThOS: | https://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.715669 |
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Title: | Design and development of MEMS biosensors | ||||||
Author: | Mahmoodi, Nasim |
ISNI:
0000 0004 6347 5476
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Awarding Body: | University of Birmingham | ||||||
Current Institution: | University of Birmingham | ||||||
Date of Award: | 2017 | ||||||
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Abstract: | |||||||
This thesis is focused on design and development of two types of MEMS bio/chemical sensors and the deposition of a thin Au film for functionalization of the sensors with thiol-SAMs. The effect of Au deposition rate on the morphology and crystallinity of the deposited Au film by thermal evaporation at room temperature on silicon was investigated. Formation of homogenous thiol-SAMs has been shown on the manufactured Au coated samples. A micro-paddle resonator as a potential mass sensor in a gas environment has been proposed. FIB machining was used to fabricate the prototype device on 500 nm thick LPCVD silicon nitride. The dynamic response of the sensor was investigated over a range of pressure and compared with the simulation results. The sensitivity of the sensor was determined experimentally to be 1.61 fg/Hz. The application of the sensor for detection of Au nanoparticles was shown. A novel type of hybrid static-dynamic micro sensor for detection in an aqueous medium was studied. This sensor is comprised of a thin membrane and a double-ended-tuning-fork (DETF) structure. The sensitivity of the sensor was numerically determined to be 91 Hz/(mJ/m2). FIB is used to make a high resolution Al2O¬3 mask for fabrication of the DETF structure.
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Supervisor: | Not available | Sponsor: | Not available | ||||
Qualification Name: | Thesis (Ph.D.) | Qualification Level: | Doctoral | ||||
EThOS ID: | uk.bl.ethos.715669 | DOI: | Not available | ||||
Keywords: | QH301 Biology ; TJ Mechanical engineering and machinery | ||||||
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