This work mainly investigates the use of aerosol assisted chemical vapour deposition (AACVD) process to fabricate thin film materials for energy efficient glazing and thin film solar cells applications. Ga-doped ZnO thin films were firstly deposited onto glass substrates by AACVD of zinc and gallium acetylacetonates in methanol. After optimizing the doping concentration, film thickness and heating temperature, ZnO:Ga coatings with high visible transparency (> 80 %) and infrared reflection (up to 48.9 % at 2500 nm) were obtained, which is close to the optical requirements for commercial energy saving glazing. Pyramid-shaped and plate-shaped zinc oxides films were then deposited on glass substrates by AACVD of zinc-acetate-dihydrate, acetic acid and deionized water in methanol. These surface-textured ZnO films exhibited good visible transparency (~70 %), low sheet resistance (~60 Ω sq-1) and ultra large haze factor (up to 98.5 %), which is the most hazy ZnO ever reported and can be potentially used as the front contact in thin-film solar cells. Finally, uniform compact CH3NH3PbI3 perovskite films with high phase purity and micron-sized pinhole-free grains were deposited on glass substrates by a novel two-step and three-step sequential AACVD process. In conclusion, AACVD shows a great potential for the scalable fabrication of ZnO-based and organometallic halide-based thin film materials.