This document is a compilation of my selected research publications in micro and nano fabrications. The papers are largely arranged in chronological order to show the development of research interests. The research works are grouped into three sections. Section one consists of 34 research papers on micro fabrication in various materials. The research was motivated by the development of a finger nail sized micro engine as explained in Papers 1 and 2. Section two of the document includes some research activities and achievements on nanocomposite materials embedded in metallic and ceramic matrices. Section 3 includes the papers to reflect the research in developing nanostructure fabrication processes. The research contained in this DSc submission shows a continuous exploration and development of novel micro/nano fabrication processes. Although the submission covers research activities spanning 15 years, from 2000 to 2015, many of the research results represent the top technology of the time. They have contributed to the ever progressing manufacturing capability of the world. The research has encompassed both theoretical and experimental studies, contributing to the understanding of the processes and materials involved.