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Title: Spectroscopic studies of etching gases and microwave diagnostics of plasmas related to the semiconductor industry
Author: Vasekova, Eva
Awarding Body: Open University
Current Institution: Open University
Date of Award: 2006
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No abstract available
Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID:  DOI: Not available