This thesis reports on the design and operation of three software tools that have been developed to integrate commercial analysis packages into an existing TCAD framework. FASTT (Factory Simulation in Total TCAD) and CASTT (Cost AnalysiS in Total TCAD) automate the creation, simulation and extraction of results of factory and cost of ownership models respectively, whilst MASTT (MAnufacturing execution System in Total TCAD) ensures that up-to-date modelling data is readily available. Together they enable faster and simpler analysis of manufacturing issues than is the case with traditional model building techniques. This enhances the existing development tool set and for the first time allows manufacturing analysis to become a routine part of process development. The thesis introduces the background associated with process development, the existing tool-set and the packages integrated by FASTT, CASTT and MASTT. Examples are used to illustrate the ease of use of the software tools and to highlight their potential. These include: the use of FASTT to identify potential production bottlenecks and capacity; identifying low cost production for a range of potential process options using CASTT; cycle time, throughput and cost of ownership analysis using both FASTT and CASTT to highlight the manufacturing differences of alternative dielectric process steps and finally, the role of MASTT during TCAD analysis to identify corrective processing after wafers have received an incorrect implant.