Use this URL to cite or link to this record in EThOS:
Title: Silicon micromachining for micro-optical device manufacture
Author: Bostock, R. M.
Awarding Body: University of Cambridge
Current Institution: University of Cambridge
Date of Award: 1998
Availability of Full Text:
Full text unavailable from EThOS.
Please contact the current institution’s library for further details.
All current laser pig-tailing methods employ either glue or a weld to secure the fibre in place. This leads to difficulty in attaining initial alignment; to movement during bonding and to instability throughout the service life. Precautions are also required to avoid device damage due to glue wicking. The approach taken in the present research is to adopt a mechanical solution, eliminating the use of either glue or a weld. In addition, this must be integrated in one part with rest of the optical system to form a compatible solution. A novel solution is developed using silicon nitride clips which hold the fibre, and are fabricated as part of the substrate. This requires the selection of a process compatible material for the clips and a method to manufacture features to allow insertion of the fibre and ensure precision alignment. The manufacture of these devices is described, both where the core of the optical fibre is below the level of the silicon substrate surface, and through the use of an extension to the process, where the fibre core is above the substrate surface. The first instance is ideal for fibre-fibre and fibre-detector connection, and the second case is required for fibre to device connection. The fabrication of these components uses innovative process steps developed through research in this work. Results of the mechanical characteristics of these devices, and of the performance under environmental testing are presented. These demonstrate that this fibre interconnection technique offers significant benefits over the current methods and that the technique meets the required environmental specifications for telecommunications components. In summary, this thesis is a description of the development of the fibre attach technique and the integration of a complete process. The research is brought to the stage where all of the steps of the complete process have been tested in practice. The results of these tests, and the results of testing working devices based on the process are presented.
Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID:  DOI: Not available