Use this URL to cite or link to this record in EThOS:
Title: Monte Carlo simulation of energy intensity distributions for electron beam lithography.
Author: Fretwell , Tracey Ann
ISNI:       0000 0004 2741 3841
Awarding Body: University of Manchester
Current Institution: University of Manchester
Date of Award: 1995
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Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID:  DOI: Not available