Process chains are regarded as viable manufacturing platforms for the production of Microand Nano Technology (MNT) enabled products. In particular, by combining several manufacturing technologies, each utilised in its optimal process window, they could benefit from the unique advantages of high-profile research technologies such as the focused ion beam (FIB) machining. The present work concerns the development of process chains and the investigation of pilot cost-effective implementations of the FIB technology in manufacturing platforms forfabrication of serial replication masters.