Use this URL to cite or link to this record in EThOS: https://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.554989
Title: A new algorithm for the absolute metrology of optical surfaces
Author: Mitchell, John Benjamin
ISNI:       0000 0004 2719 3615
Awarding Body: Kingston University
Current Institution: Kingston University
Date of Award: 1996
Availability of Full Text:
Access from EThOS:
Access from Institution:
Abstract:
In this thesis, the problem of the metrology of optical surfaces is examined. The need for accurate metrology is established with regard to optical wavefronts reflecting or refracting at the surfaces of optical components. Optical interferometry is identified as the most useful analytical tool for surface metrology by virtue of its high precision and accuracy. Accordingly the theory of interferometry is briefly presented. The application of the theory to the interferometric instruments is shown together with measuring configurations for the various optical surfaces commonly encountered. An extensive overview of the techniques used to evaluate data from interferometric measurements is given with particular emphasis on precision phase measuring methods. Most interferometric measurements of surfaces aremade relative to a reference surface of high quality. Where the accuracy of the surface to be measured is comparable to, or better than, that of the reference surface, an absolute measurement technique is required in order to give meaningful results. A review is given of the existing methods for the absolute measurement of nominally flat and spherical surfaces and the shortcomings of these methods. A new algorithm for the absolute testing of flat surfaces is developed, based on relative measurements of pairs from a population of three test flats in a number of positional combinations. The new method has a number of potential advantages over those previously described, particularly since it yields information about the flats over their entire surfaces on a square grid of points. The implementation of the new method on a Zygo Mark IV interferometer is described together with experimental results using both synthesized and actualexperimental data. Suggestions for improvements to the method and its implementation are made. A speculative study of other possible techniques for absolute flatness measurement is presented, including the possible application of the Ritchey-Common test, point diffraction interferometry, phase conjugation and profilometry. A full and up to date survey of the pertinent literature is given throughout the thesis.
Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID: uk.bl.ethos.554989  DOI: Not available
Keywords: Physics
Share: