Use this URL to cite or link to this record in EThOS: https://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.539745
Title: Liquid-injection atomic layer deposition of cerium-doped hafnium oxide dielectric films
Author: Pham, Nam Hung
ISNI:       0000 0004 2706 0054
Awarding Body: University of Liverpool
Current Institution: University of Liverpool
Date of Award: 2010
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Abstract:
No abstract available
Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID: uk.bl.ethos.539745  DOI:
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