Use this URL to cite or link to this record in EThOS:
Title: Stress measurements in deep sub-micron damascene copper interconnects
Author: Wilson, Christopher J.
ISNI:       0000 0004 2686 6734
Awarding Body: University of Newcastle Upon Tyne
Current Institution: University of Newcastle upon Tyne
Date of Award: 2009
Availability of Full Text:
Access from EThOS:
No abstract available
Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID:  DOI: Not available