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Title: Ion Energy Distribution Measurement at the Bias Substrate Electrode in Noble and Acetylene Gas Plasmas for Diamond - Like Carbon Deposition
Author: Baby, Aji
ISNI:       0000 0001 3434 7799
Awarding Body: Ulster
Current Institution: Ulster University
Date of Award: 2008
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This thesis describes the characterisation of acetylene-argon plasmas by mass and energy spectrometry as well as infra-red absorption and electrical techniques under conditions favourable to diamond-like carbon deposition. The neutral, positive ionic species and energy distributions measured in an ICP at the rf biased electrode are the first such measurements reported with this mixture under various bias and pressure conditions suited to DLC growth. These are compared to measurements taken in a CCP reactor at a remote location with respect to the driven electrctrode.
Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID:  DOI: Not available