Title:
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Modelling for Strained Silicon CMOS Technology
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The metal-oxide-semiconductor field effect transistor (MOSFET) has been scaling down
aggressively over many technology nodes in order to follow Moore's Law predictions. Strain
engineering to the device channel can modify the band structure and so enhance carrier mobility. It
has widely been incorporated to improve device performance. Novel modelling techniques,
including strain effects, are necessarily required.
The electrical characteristics of semiconductor hav9r.their origin in energy band structure. In this
thesis, a new semi-analytical model is developed lor describing the energy band structure under
strain conditions. Furthermore, the band parameters of the SiGe heterojunction are generalised for
different combinations of Ge fractions. Those results can be used to understand and to model the
transport properties of carriers and the variation of threshold voltage measured from strained Si
MOSFETs. The calculated band parameters are then entered into a newly developed model to
calculate the threshold voltage variation in strained Si MOSFETs having a dual channel architecture.
Finally, understanding the strain effects on the band structure is extended to the modelling of
strained-induced variation of carrier mobility using the piezoresistance concept. The overviews of
each main-result chapter in this thesis are given below:
In Chapter 3, model using the original k'p method for the energy dispersion of holes in the inversion
layer of p-MOSFETs is complicated and demands extensive computational resource. Those are the
reasons why the development of simulations for p-MOSFETs lagged behind their n-MOSFET
counterpart. In this work, the band structure for holes in an inversion layer is dramatically
simplified using a new semi-analytical model. It is described by novel non-parabolic and
anisotropic expressions such that the overall computational complexity is significantly reduced
compared to a fully numerical treatment. Here, the band parameters are also generalised for
different Ge fractions in a SiJ-xGexfilm grown on a relaxed SiJ.yGeyvirtual substrate.
In Chapter 4, an analytical model of threshold voltage for globally strained SiiSiGe CMOS devices
using a dual channel architecture is developed. A model to calculate threshold voltage is developed
which includes effects of device geometry, material properties, such as band parameters and
permittivity, and channel and substrate doping concentrations. The threshold voltage roll-off due to
short channel effects is included using the voltage-doping transformation. The proposed model is validated in agreement with simulations and experiments. It provides a physical insight for the
variation of threshold voltage for both n- and p-MOSFETs having a dual channel architecture and it
can be generalised to apply to single channel devices also.
In Chapter 5, the conventional piezoresistance model has commonly been used to describe mobility
enhancement for low levels of process induced strain in CMOS technology. However, many reports
show it failing at the high levels of stress needed for future technology generations. This is because
approximations made are only valid for very low stress levels. The piezomobility formulation
removes an approximation assumed in the commonly-used piezoresistance model and improves its
accuracy to much higher stress regimes while retaining its simplicity. The validity of the new
formulation is demonstrated for Monte Carlo simulations of mobility, nMOSFETs, pMOSFETs,
and nanowires in stress regimes where the commonly-used piezoresistance model has previously
been reported to fail.
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