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Title: Laser processing of inkjet printed and RF magnetron sputtered SnO₂:Sb
Author: Wilson, Sharron Louise
Awarding Body: Nottingham Trent University
Current Institution: Nottingham Trent University
Date of Award: 2008
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The desire for flexible electronics, in particular, flexible displays is driving research into processing methods that would enable the application of a range of functional materials to low temperature substrates. Transparent Conducting Oxides are materials which typically require thermal annealing or deposition at elevated temperatures to obtain suitable characteristics. Sputter deposited Indium Tin Oxide (ITO or In203:Sn0 2 ) is the most common transparent conductor material, but indium is relatively scarce and therefore expensive. Antimony Tin Oxide (ATO or SnO^iSb) is a promising alternative that, in the present study, has been formulated into an inkjet printable solution for directwrite patterning and for the first time the novel method of laser processing has been shown to improve the characteristics via a technique that could be used with low temperature substrates. Films of inkjet printed SnOi:Sb have been laser processed using a KrF UV Excimer laser emitting at 248nm. The electrical and optical properties of the films have been investigated for a range of laser fluences and number of pulses. A moiphological examination has also been undertaken using x-ray diffraction, scanning electron microscopy and transmission electron microscopy. Furthermore, RF magnetron sputtered films of SnOziSb deposited onto a flexible substrate (Cronar®) have been laser processed to provide a comparator. The electrical, optical and morphological characteristics of these films have also been investigated. It has been demonstrated that the electrical properties of both inkjet printed and RF magnetron sputtered films of Sn02:Sb can be improved witli laser processing. The conductivity of inkjet printed films was improved by two orders of magnitude, while RF magnetron sputtered films underwent a 1.5 fold improvement. Increases in crystallinity were obseiwed for laser processed inkjet printed films and electron microscopy showed an area of densification consistent with the expected optical penetration depth. Shifts in the IR end of the transmission spectrum indicated an increase in carrier concentration. In contrast, no increases in ciystallinity nor areas of densification were detectable with RF magnetron sputtered films and tliere was no apparent shift in the IR end of the transmission spectra. The mechanisms for improvement in the conductivity of the films are discussed in terms of increasing the carrier concentration and mobility of inkjet printed films, and reducing die defect regions for the RF magnetron sputtered films.
Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID:  DOI: Not available