Use this URL to cite or link to this record in EThOS:
Title: Radio frequency plasma power spectroscopy for semiconductor device processing
Author: Law, Victor John.
ISNI:       0000 0001 3605 8181
Awarding Body: University of Ulster
Current Institution: Ulster University
Date of Award: 2005
Availability of Full Text:
Access from EThOS:
No abstract available
Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID:  DOI: Not available