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Title: Spectroscopic and electron impact studies of molecules relevant to plasma etching
Author: Eden, Samuel Peter.
ISNI:       0000 0001 3438 1727
Awarding Body: University College London (University of London)
Current Institution: University College London (University of London)
Date of Award: 2003
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No abstract available
Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID:  DOI: Not available