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Title: An investigation of novel processes for microlithography using MeV ion beams
Author: Gomez-Morilla, Inmaculada.
ISNI:       0000 0001 3503 3687
Awarding Body: University of Oxford
Current Institution: University of Oxford
Date of Award: 2003
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No abstract available
Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID:  DOI: Not available