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Title: SIMS depth profiling of ultra-low energy ion implanted silicon using sub-keV ion beams
Author: Bellingham, Julie.
ISNI:       0000 0001 3456 9367
Awarding Body: University of Warwick
Current Institution: University of Warwick
Date of Award: 2003
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Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID:  DOI: Not available