Use this URL to cite or link to this record in EThOS:
Title: Silicon on insulator fabrication using silicon germanium etch stop and polish stop techniques.
Author: Gay, Diane Lorraine.
ISNI:       0000 0001 3492 6547
Awarding Body: Queen's University of Belfast
Current Institution: Queen's University Belfast
Date of Award: 1997
Availability of Full Text:
Full text unavailable from EThOS.
Please contact the current institution’s library for further details.
No abstract available
Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID:  DOI: Not available
Keywords: Physical chemistry