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Title: The effect of structural variations on the lithographic performance of the poly(chloromethylstyrene-co-methylstyrene) resist system
Author: Griffiths, L. G.
ISNI:       0000 0001 3520 5418
Awarding Body: University of Kent
Current Institution: University of Kent
Date of Award: 1988
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No abstract available
Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID:  DOI: Not available
Keywords: Polymer use in microchips