Use this URL to cite or link to this record in EThOS:
Title: A study of electrical, optical and structural properties of RF sputtered and ion beam sputtered silicon films
Author: Awang Mat, A. F.
ISNI:       0000 0001 3433 6416
Awarding Body: University of Reading
Current Institution: University of Reading
Date of Award: 1988
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No abstract available
Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID:  DOI: Not available
Keywords: Solid-state physics