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Title: The fabrication of small geometry MOSFET's using electron beam lithography
Author: Binnie, C. E.
Awarding Body: University of Glasgow
Current Institution: University of Glasgow
Date of Award: 1985
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No abstract available
Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID:  DOI: Not available
Keywords: Solid-state physics