Use this URL to cite or link to this record in EThOS:
Title: Depth profiling of ultra-shallow implants in silicon.
Author: Al-Harthi, Salim.
ISNI:       0000 0001 3405 9893
Awarding Body: University of Warwick
Current Institution: University of Warwick
Date of Award: 2001
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No abstract available
Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID:  DOI: Not available
Keywords: Medium energy ion scattering