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Title: Silicon micromachining technology for drop-on-demand liquid dispensers.
Author: Prochaska, A.
ISNI:       0000 0001 3502 190X
Awarding Body: Queen's University of Belfast
Current Institution: Queen's University Belfast
Date of Award: 2001
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No abstract available
Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID:  DOI: Not available
Keywords: Electromechanics; Fusion bonding; Grinding