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Title: Novel techniques for the control of the properties of reactively-sputtered thin films
Author: Danson, Nigel
ISNI:       0000 0001 3404 4333
Awarding Body: Loughborough University
Current Institution: Loughborough University
Date of Award: 1996
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Precise control techniques are of fundamental importance in the accurate deposition of optical, mechanical, electrical and magnetic thin films. The objective of this work was twofold: to devise and evaluate novel control systems for reactive sputtering primarily oxide films, and investigate the effects of these processes on resultant film properties.
Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID:  DOI: Not available
Keywords: Magnetron; Ion