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Title: An electron optical line source for microelectronic engineering.
Author: Brodie, Alan David.
ISNI:       0000 0001 3481 1539
Awarding Body: University of Cambridge
Current Institution: University of Cambridge
Date of Award: 1990
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No abstract available
Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID:  DOI: Not available
Keywords: Electron optics