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Title: Spectroscopic studies of the etching of Si and SiOsub(2) substrates in CFsub(4)/Osub(2) discharges
Author: Hydes, A. J.
ISNI:       0000 0001 3585 7053
Awarding Body: University of Bristol
Current Institution: University of Bristol
Date of Award: 1984
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No abstract available
Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID:  DOI: Not available
Keywords: Physical chemistry