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Title: Chemistry of plasmas used in the fabrication of integrated circuits
Author: Simpson, Michael
ISNI:       0000 0001 3413 366X
Awarding Body: University of Aston in Birmingham
Current Institution: Aston University
Date of Award: 1982
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No abstract available
Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID:  DOI: Not available
Keywords: Chemistry