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Title: Exploration of some methods for the destruction of CF←4 and C←2F←6.
Author: Norton, Ian Andrew.
ISNI:       0000 0001 3449 8079
Awarding Body: University of Bristol
Current Institution: University of Bristol
Date of Award: 2000
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No abstract available
Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID:  DOI: Not available
Keywords: Fluorine; Silicon wafer; Greenhouse gases