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Title: Studies of the reaction of silane and hydrogen peroxide forming silica thin films.
Author: Taylor, Mark Philip.
ISNI:       0000 0001 3511 0582
Awarding Body: University of Bristol
Current Institution: University of Bristol
Date of Award: 1996
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No abstract available
Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID:  DOI: Not available
Keywords: Chemical vapour deposition