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Title: Resolution limits in electron beam lithography
Author: Rishton, Stephen Anthony
ISNI:       0000 0001 3519 6718
Awarding Body: University of Glasgow
Current Institution: University of Glasgow
Date of Award: 1984
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Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID:  DOI: Not available
Keywords: T Technology (General)