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Title: Electrochemical behaviour of silicon for micromachining applications.
Author: Ozdemir, C. Hakan
ISNI:       0000 0001 3462 2690
Awarding Body: University of Southampton
Current Institution: University of Southampton
Date of Award: 1992
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No abstract available
Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID:  DOI: Not available
Keywords: Semiconductor physics