Use this URL to cite or link to this record in EThOS:
Title: Control and communications for semiconductor factory automation
Author: Dilworth, J. C.
ISNI:       0000 0001 3424 5768
Awarding Body: Cranfield Institute of Technology
Current Institution: Cranfield University
Date of Award: 1991
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No abstract available
Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID:  DOI: Not available
Keywords: Computer Aided Manufacturing