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Title: The plasma etching of III-V semiconductor materials
Author: Carter, A. J.
ISNI:       0000 0001 3522 4037
Awarding Body: University of Wales, College of Cardiff
Current Institution: Cardiff University
Date of Award: 1989
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No abstract available
Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID:  DOI: Not available
Keywords: Solid-state physics