Use this URL to cite or link to this record in EThOS:
Title: The energies of ions, electrons and neutral in reactive ion etching plasmas.
Author: May, Paul W.
ISNI:       0000 0001 2418 4789
Awarding Body: University of Bristol
Current Institution: University of Bristol
Date of Award: 1991
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No abstract available
Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID:  DOI: Not available
Keywords: Solid-state physics