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Title: Computational and instrumental developments in quantitative Auger electron analysis
Author: Jackson, Andrew Robert
Awarding Body: University of York
Current Institution: University of York
Date of Award: 1999
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The technique of quantitative Auger electron spectroscopy (AES) is central to modem surface analysis. Development, both in terms of new instrumental apparatus and the theoretical basis of Auger analysis, has been the subject of intense research. The work presented here investigates two of the current issues surrounding Auger electron spectroscopy and microscopy. The modelling of electron-solid interaction is reviewed, and investigations are carried out into the two well established computational techniques, transport theory and Monte Carlo simulation. The transport mean free path, V and the inelastic mean free path, A* describe electron transport in solids to the first order. Variations in these parameters with energy and atomic number are explored with a view to identifying trends and establishing the extent to which generalisations are valid. Although transport theory calculations have been shown to give an accurate representation of true electron behaviour, their application is largely limited to homogeneous materials. Monte Carlo modeling provides us with a more rigorous treatment of complex experimental conditions. A new Monte Carlo model is presented which allows extension of existing simulations to incorporate heterogeneous multilayered samples. The design of integrated circuits is an extremely fast moving technology, with routine manufacture of nanometric feature sizes now becoming a reality. The second part of this work is devoted to the design of an angle resolved electron spectrometer with a very high resolution field emission electron probe. It is intended that high resolution analysis, coupled with the ability to resolve the azimuthal component of electron trajectories, will offer new insight into the surface features of ultra large scale integrated circuits.
Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID:  DOI: Not available