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Title: A multi-process reactor for thin film transistor fabrication at low temperatures.
Author: Quinn, Liam Joseph.
ISNI:       0000 0001 3503 8568
Awarding Body: Queen's University of Belfast
Current Institution: Queen's University Belfast
Date of Award: 1995
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No abstract available
Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID:  DOI: Not available
Keywords: Microelectronics; MOSFETs