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Title: Coherent optical detection techniques in surface metrology
Author: Holmes, R. D.
ISNI:       0000 0001 3580 8315
Awarding Body: University of Nottingham
Current Institution: University of Nottingham
Date of Award: 1995
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No abstract available
Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID:  DOI: Not available
Keywords: Confocal interferometry; Ellipsometry; Profiling