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Title: Laser beam characterisation for industrial applications
Author: Apte, Paul
ISNI:       0000 0001 3425 8905
Awarding Body: Loughborough University
Current Institution: Loughborough University
Date of Award: 2003
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This thesis describes the theory, development and applications of laser beam characterisation for industrial laser materials processing systems. Descriptions are given of novel forms of beam diagnostic systems and their integration into highly automated industrial tools. Work is also presented that has contributed to the new ISO standard on beam characterisation. Particular emphasis is given to excimer laser applications and UV micromachining.
Supervisor: Not available Sponsor: European Commission
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID:  DOI: Not available
Keywords: Excimer