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Title: Inductively coupled Ar/Clâ‚‚ plasma etching of GaN
Author: Rizvi, Syed Shabbar Abbas.
ISNI:       0000 0001 3520 4028
Awarding Body: University of Ulster
Current Institution: Ulster University
Date of Award: 2003
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No abstract available
Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID:  DOI: Not available
Keywords: Optical emission spectroscopy