Use this URL to cite or link to this record in EThOS:
Title: Radiation damage in Si(001) due to low energy Ar and Cl ion bombardment
Author: Al-Bayati, Amir H. H.
ISNI:       0000 0001 3405 219X
Awarding Body: University of Salford
Current Institution: University of Salford
Date of Award: 1991
Availability of Full Text:
Access from EThOS:
No abstract available
Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID:  DOI: Not available
Keywords: Semiconductor etching