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Title: Study of silicon damage caused by ultra-low energy boron implantation
Author: Zhang, Shenjun.
Awarding Body: University of Salford
Current Institution: University of Salford
Date of Award: 2001
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No abstract available
Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID:  DOI: Not available
Keywords: Solid-state physics