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Title: Simulation of depth resolution limitations in SIMS depth profiling.
Author: Badheka, Ranjan.
ISNI:       0000 0001 3435 1093
Awarding Body: University of Salford
Current Institution: University of Salford
Date of Award: 1994
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No abstract available
Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID:  DOI: Not available
Keywords: Semiconductor surfaces; Atomic collisions