Use this URL to cite or link to this record in EThOS:
Title: Semiconductor process modelling.
Author: Bennett, Donald John.
ISNI:       0000 0001 3458 4479
Awarding Body: University of Paisley
Current Institution: University of the West of Scotland
Date of Award: 1994
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No abstract available
Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID:  DOI: Not available
Keywords: Ion implantation simulation