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Title: Modifications of radiofrequency capacitive discharge for deposition of carbon coatings
Author: Goruppa, Alexander.
ISNI:       0000 0001 3506 9591
Awarding Body: Open University
Current Institution: Open University
Date of Award: 2002
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No abstract available
Supervisor: Not available Sponsor: Not available
Qualification Name: Thesis (Ph.D.) Qualification Level: Doctoral
EThOS ID:  DOI: Not available
Keywords: Plasma physics & gas discharges